Extended damping model for out-of-plane-comb driven micromirrors

Klose, T.T.KloseSandner, T.T.SandnerSchenk, H.H.SchenkLakner, H.H.Lakner2022-03-102022-03-102006https://publica.fraunhofer.de/handle/publica/3512932-s2.0-33646196462enMEMSscanning micromirrorcomb drivedamping621Extended damping model for out-of-plane-comb driven micromirrorsconference paper