Willich, P.P.Willich2022-03-092022-03-091994https://publica.fraunhofer.de/handle/publica/322968Electron probe microanalysis (EPMA) is presented as a versatile technique of local quantitative analysis in the near-surface region. Recent developments concern the sensitive detection of the ultra-light elements (B, C, N, 0) including the possibility of accurate quantitative analysis when EPMA is based on wavelength-dispersive X-ray spectrometry (WDS). Modem matrix correction procedures include the possibility of analysis at low electron energies and offer practically useful applications in respect of thin films and layered structures.encoating structuredünne Schichtelectron probe microanalysisElektronenstrahlmikroanalyselayered structureSchichtstruktur667conference paper