Fabrication and characterization of a force coupled sensor-actuator system for adjustable resonant low frequency vibration detection

Forke, R.R.ForkeScheibner, D.D.ScheibnerHiller, K.K.HillerGessner, T.T.GessnerDoetzel, W.W.DoetzelMehner, J.J.Mehner2022-03-042022-03-042008https://publica.fraunhofer.de/handle/publica/217824en537Fabrication and characterization of a force coupled sensor-actuator system for adjustable resonant low frequency vibration detectionjournal article