Forke, R.R.ForkeScheibner, D.D.ScheibnerMehner, J.E.J.E.MehnerGessner, T.T.GessnerDötzel, W.W.Dötzel2022-03-102022-03-102008https://publica.fraunhofer.de/handle/publica/35793710.1016/j.sna.2007.04.0042-s2.0-38849083261en621Electrostatic force coupling of MEMS oscillators for spectral vibration measurementsconference paper