Decoration of Al implantation profiles in 4H-SiC by bevel grinding and dry oxidation

Under CopyrightKocher, MatthiasMatthiasKocherErlbacher, TobiasTobiasErlbacherRommel, MathiasMathiasRommelBauer, AntonAntonBauer2022-03-1412.10.20182018https://publica.fraunhofer.de/handle/publica/40177810.24406/publica-fhg-401778en670620530Decoration of Al implantation profiles in 4H-SiC by bevel grinding and dry oxidationposter