Oxidation resistance and nanostructure of PECVD Ti-Si-C-N coatings

Thewes, AlexanderAlexanderThewesPaschke, HannoHannoPaschkeBrückner, TristanTristanBrücknerSternemann, C.C.SternemannPaulus, M.M.PaulusTillmann, W.W.TillmannLopes Dias, N.F.N.F.Lopes DiasUrbanczyk, J.J.Urbanczyk2024-03-212024-03-212023https://publica.fraunhofer.de/handle/publica/464392encoatingOxidation resistance and nanostructure of PECVD Ti-Si-C-N coatingsbook article