Development and characterization of microelectrode arrays by means of electrochemical and surface analysis methods.

Wittkampf, M.M.WittkampfNaendorf, B.B.NaendorfCammann, K.K.CammannRospert, M.M.RospertMokwa, W.W.MokwaHagenhoff, B.B.HagenhoffBenninghoven, A.A.BenninghovenAmrein, M.M.AmreinReichelt, R.R.ReicheltGründig, B.B.Gründig2022-03-092022-03-091994https://publica.fraunhofer.de/handle/publica/322372enDünnschichttechnikHalbleitertechnologiemicroelectrodesMikroelektrodeOberflächenanalysesemiconductor technologySensoriksurface analysisthin films621Development and characterization of microelectrode arrays by means of electrochemical and surface analysis methods.conference paper