Strain energy driven adhesion test for adherence characterization of thin polymer films for microelectronic applications

Wöhrmann, M.M.WöhrmannTöpper, M.M.TöpperLang, K.-D.K.-D.Lang2022-03-122022-03-122013https://publica.fraunhofer.de/handle/publica/383778en621Strain energy driven adhesion test for adherence characterization of thin polymer films for microelectronic applicationsconference paper