Schäfer, WolfgangWolfgangSchäferZimmer, KlausKlausZimmerBurke, TheresaTheresaBurkeReinhardt, AndreaAndreaReinhardt2022-03-042022-03-042008https://publica.fraunhofer.de/handle/publica/216070Micro and Nano technological products are increasing rapidly in sectors such as medical, automotive and consumer. To produce these new products appropriate manufacturing technologies are needed. The upcoming community called MINAM - Micro and Nano Manufacturing will support developments in the area of future production technologies.enmicromanufacturingnanomanufacturingMINAMmicrosystemEuropean Technology Platformnanostructureroadmapstrategic research agendaMikrosystembook article