Laser activation of AIN surfaces for generation of electrically conductive structures

Körber, K.K.KörberTönshoff, H.K.H.K.TönshoffDieckhoff, S.S.Dieckhoff2022-03-092022-03-092002https://publica.fraunhofer.de/handle/publica/339747en620660671Laser activation of AIN surfaces for generation of electrically conductive structuresconference paper