Lindekugel, StefanStefanLindekugelLautenschlager, HaraldHaraldLautenschlagerRuof, T.T.RuofReber, S.S.Reber2022-03-106.9.20122008https://publica.fraunhofer.de/handle/publica/36168110.4229/23rdEUPVSEC2008-3AV.1.1510.24406/publica-r-361681This paper presents the beneficial effects of Remote Plasma Hydrogen passivation (RPHP) on Recrystallized Wafer-Equivalent (RexWE) solar cells. We varied the dominating parameters of the RPHP process and analysed their effect on the RexWE solar cell parameters. A low and a high temperature regime were investigated for the RPHP. Both showed remarkable results in terms of Voc, FF, Jsc and boosts. The striking benefit of a newly optimised hydrogenation process increased the Voc from 454 to 54 mV and the efficiency from 4.0 to 6.0% by means of a 45 min process at 450°C.en621conference paper