Nyarsik, L.L.NyarsikKörner, K.K.KörnerKrahn, A.A.KrahnSpur, G.G.Spur2022-03-032022-03-031992https://publica.fraunhofer.de/handle/publica/181516A possibility for measuring the form, waviness and roughness of fine-machined surfaces by interferometric means is discussed. A variety of fine-machined surfaces shows parameters of hight in the range of microns. So it is necessary to increase the interferometric increment in a two-beam-interferometer with visible light by grazing incidence illumination. This principle was investigated in a new prism interferometer. A test method for the interferometer is proposed and measurements are represented.defeinbearbeitete Oberflächefine-machined surfaceFormmessungInterferometrieinterferometrymeasurement of formprism interferometerPrismeninterferometerRauheitsmessungwaviness and roughnessWelligkeitsmessung670681journal article