Arnold, W.W.Arnold2022-03-032022-03-032001https://publica.fraunhofer.de/handle/publica/200011Surface acoustic waves with slightly different frequencies are launched from transducers towards the tip of an atomic force microscope. The tip vibrates at a frequency given by the difference between the two waves. The vibrations are measured by monitoring the light reflected from the cantilever onto the photodiode.enacoustic surface wavehigh resolutionsurface characterizationmicroscope620658670530journal article