Bollmann, D.D.BollmannMerkel, R.R.MerkelKlumpp, A.A.Klumpp2022-03-032022-03-031997https://publica.fraunhofer.de/handle/publica/19008110.1016/S0167-9317(97)00100-7en621Conformal copper deposition in deep trenchesjournal article