Single step rapid thermal diffusion for selective emitter formation and selective oxidation

Schindler, RolandRolandSchindlerBreymesser, A.A.BreymesserLautenschlager, HaraldHaraldLautenschlagerMarckmann, C.C.MarckmannNoel, S.S.NoelSchubert, U.U.Schubert2022-03-092022-03-091996https://publica.fraunhofer.de/handle/publica/32690010.1109/PVSC.1996.564055en621697Single step rapid thermal diffusion for selective emitter formation and selective oxidationconference paper