Panowitz, S.S.PanowitzMüller, MichaelMichaelMüllerFranzke, J.J.FranzkeOehr, C.C.Oehr2022-03-112022-03-112009https://publica.fraunhofer.de/handle/publica/365278Functionalization of small and narrow tubings with plasma is a challenge. It is pos-sible with so-called microplasmas which are in the dimension of several mm. Functionaliza-tion with amino-groups is shown exemplary. Therefore experiments were carried with differ-ent mixtures of He and NH3 or He and N2+H2. The optical emission properties of these mix-tures were compared.en660610620conference paper