Smart systems integration by using micro and nano technologies

Geßner, ThomasThomasGeßnerWiemer, MaikMaikWiemerBertz, AndreasAndreasBertzVogel, MartinaMartinaVogel2022-03-042022-03-042009https://publica.fraunhofer.de/handle/publica/220832en620Smart systems integration by using micro and nano technologiesbook article