Hofmann, U.U.HofmannJanes, J.J.Janes2022-03-112022-03-112011https://publica.fraunhofer.de/handle/publica/37535910.1007/978-3-642-21381-6_16The concept and design of a low cost two-axes MEMS scanning mirror with an aperture size of 7 millimetres for a compact automotive LIDAR sensor is presented. Hermetic vacuum encapsulation and stacked vertical comb drives are the key features to enable a large tilt angle of 15 degrees. A tripod MEMS mirror design provides an advantageous ratio of mirror aperture and chip size and allows circular laser scanning.en621conference paper