One-level gray-tone lithography for micro optical components

Reimer, K.K.ReimerHenke, W.W.HenkeQuenzer, H.J.H.J.QuenzerDemmeler, R.R.DemmelerWagner, B.B.Wagner2022-03-092022-03-091996https://publica.fraunhofer.de/handle/publica/326681en621One-level gray-tone lithography for micro optical componentsconference paper