Transparent crystalline aluminium oxide layers deposited by pulsed sputtering. Technical report 1995/2

Schiller, S.S.SchillerGoedicke, K.K.GoedickeHötzsch, G.G.Hötzsch2022-03-072022-03-071995https://publica.fraunhofer.de/handle/publica/288171en667670620Transparent crystalline aluminium oxide layers deposited by pulsed sputtering. Technical report 1995/2book