Dudaicevs, H.H.DudaicevsManoli, Y.Y.ManoliMokwa, W.W.MokwaSchmidt, W.W.SchmidtSpiegel, E.E.Spiegel2022-03-092022-03-091995https://publica.fraunhofer.de/handle/publica/324345The sensor presented here has been developed for the measurement of absolute pressure in the fields of automotive and industrial applications. The integration of the system consists of a pressure sensor and a signal conditioning circuit with an analog output on a chip of 3.6mm². The fabrication technique to form the sensor is surface micromachining implemented in a standard 1.5µm CMOS process allowing the construction of very small pressure sensor elements with exellent mechanical properties. The temperature coefficient of the hole system is lower than 200 ppm/øC without any compensation. It can be used in a temperature range of -40øC to +125øC.enDruckfestigkeitDruckmessungkapazitives MeßverfahrenKondensatorschalterfiltersurface micromachiningTemperaturgang621conference paper