Pongratz, LudwigLudwigPongratzVannahme, KaiKaiVannahme2022-09-012022-09-012022https://publica.fraunhofer.de/handle/publica/42010310.2961/jlmn.2022.01.2007enDirect Laser Interference Pattering DLIPbeam shapinghomogenous topographylarge area periodic texturesincrease of throughputBeam Shaping the Direct Laser Interference Patterning Spotjournal article