Kuhlow, B.B.KuhlowPawlowski, E.E.PawlowskiFerstl, M.M.Ferstl2022-03-092022-03-091993https://publica.fraunhofer.de/handle/publica/321887Arrays of 16*16 diffractive optical microlenses are presented that are used in free space interconnection networks of electronic switching stages. They have been fabricated as 'binary optical elements' in glass substrates by microstructuring techniques. Individual elements have a diameter of 2 mm and 200 mu m and 16 levels per zone. Arrays with different F-number lenses for the two wavelengths 1.52 mu m and 0.63 mu m have been fabricated. In order to reduce reflection losses and cross talk in an interconnection network the lens arrays have been AR-coated with a two layer system of TiO2 and SiO2. The measured diffraction efficiency of the lenses with large F-numbers is 95%.encomputer-generated holographyelectron beam lithographyetchingholographic optical elementslensesmasksoptical interconnectionsoptical linksoptical switchesoptical workshop techniquesoptical zone plates2d arraysdcgelectron beam writingantireflection coatinglinear volume gratingsfresnel zone plate lensesanisotropic etchingoptical interconnects16*16 diffractive optical microlensesfree space interconnection networkselectronic switching stagesglass substratesmicrostructuring techniquesdiffraction efficiencytio2-sio2 layered system621conference paper