Compact source and beam delivery system for EUV radiation using a Schwarzschild objective

Mann, K.K.MannBarkusky, F.F.BarkuskyBayer, A.A.BayerPeth, C.C.PethTöttger, H.H.TöttgerFeigl, T.T.FeiglKaiser, N.N.Kaiser2022-03-102022-03-102005https://publica.fraunhofer.de/handle/publica/34937910.1117/12.6149892-s2.0-30844463882en620Compact source and beam delivery system for EUV radiation using a Schwarzschild objectiveconference paper