Dorner, J.J.Dorner2022-03-092022-03-091998https://publica.fraunhofer.de/handle/publica/330493The paper gives an overview about the fundamental principles of cleanroom technology. It's shown where the cleanroom technology is used and what are the main contaminants and where they are coming from. The different cleanroom classes are described and different cleanroom concepts in practice are shown.enairflowcontaminationKontaminationKontaminationsquelleLuftströmungOberflächeneigenschaftenOberflächenreinheitparticleReinraumtechnikSurface CleanlinessTeilchen670conference paper