Michel, Marvin D.Marvin D.MichelWeyers, SaschaSaschaWeyersWeiler, DirkDirkWeilerGeruschke, ThomasThomasGeruschkeBlaeser, SebastianSebastianBlaeserZakizade, ElaheElaheZakizadeHochschulz, FrankFrankHochschulzVogt, HolgerHolgerVogt2022-03-142022-03-142020https://publica.fraunhofer.de/handle/publica/40841710.5162/SMSI2020/C3.3Fraunhofer IMS provides a manufacturing process for microbolometer based FIR-imagers (IRFPAs). Beside classical approaches with membranes of microbolometers thermally isolated by lateral legs, Fraunhofer IMS developed a manufacturing process for a thermal isolation realized by nanotubes. This approach benefits the scalability of pixel pitch, because of a pitch-independent thermal isolation. Latest progress in mechanical stability as well as a qualitative characterization of a demonstrator device with 17 mm nanotube-microbolometers on a 17 mm ROIC in QVGA-resolution will be presented.enFIR-imageruncooled imagermicrobolometernanotubesscalabilityQVGA (Quarter Video Graphics Array)infrared focal plane array (IRFPA)621conference paper