Loyen, L. vanL. vanLoyenBöttger, T.T.BöttgerSchädlich, S.S.SchädlichBraun, S.S.BraunFoltyn, T.T.FoltynLeson, A.A.LesonScholze, F.F.ScholzeMüllender, S.S.Müllender2022-03-102022-03-102005https://publica.fraunhofer.de/handle/publica/34838710.1016/j.apsusc.2005.01.1132-s2.0-24644470045A laboratory extreme ultraviolet reflectometer (EUVR) for the wavelength range from 10 to 16 nm was built at IWS Dresden using a gold target laser pulse plasma (Au-LPP) source. The peak reflectance and the center wavelength are reproduced in relative standard deviation of 0.2 and 0.02%, respectively. In contrast to measurements using linearly polarized s-adjusted synchrotron radiation at PTB, measurements with non-polarized radiation at the EUVR yield systematically lower values for the reflectance due to the smaller reflectance of the p-component at higher angles of incidence.en667621671669conference paper