Wuttig, A.A.WuttigSteinert, J.J.SteinertDuparre, A.A.DuparreTruckenbrodt, H.H.Truckenbrodt2022-03-092022-03-091999https://publica.fraunhofer.de/handle/publica/333084The surface microtopography and subsurface damage of fused silica have been examined after different stages of the manufacturing process. Results are presented of etching experiments and measurements performed by white light interferometry, atomic force microscopy and total light scattering.enfused silicalight scatteringsubsurface damagesurface polishingsurface roughness620conference paper