Brecher, ChristianChristianBrecherPyschny, NicolasNicolasPyschnyBastuck, ThomasThomasBastuck2022-03-122022-03-122013https://publica.fraunhofer.de/handle/publica/383850This paper presents the development of a novel flexure-based micromanipulator for the alignment of optical components (Figure 1). The realized device is based on a six-axis parallel mechanism and piezo-positioners using stick-slip principle and providing nanometre resolution. Results of this paper show that the flexure-based design allows realizing nanometre steps with the moving platform in all axes.enconference paper