Implication of oxygen vacancies on current conduction mechanisms in TiN/Zr1-xAlxO2/TiN metal-insulator-metal structures

Paskaleva, A.A.PaskalevaLemberger, M.M.LembergerBauer, A.J.A.J.BauerFrey, L.L.Frey2022-03-042022-03-042011https://publica.fraunhofer.de/handle/publica/22458810.1063/1.3565056en670620530Implication of oxygen vacancies on current conduction mechanisms in TiN/Zr1-xAlxO2/TiN metal-insulator-metal structuresjournal article