Tortschanoff, A.A.TortschanoffLenzhofer, M.M.LenzhoferFrank, A.A.FrankKenda, A.A.KendaSandner, T.T.SandnerSchenk, H.H.Schenk2022-03-112022-03-112009https://publica.fraunhofer.de/handle/publica/36577810.1109/ISOT.2009.53261092-s2.0-72749104420We discuss recent improvements of our MEMS-based FT-IR spectrometer. A novel MEMS actuator design of the translational mirrors features an increased mirror surface of 7 mm2 and enables larger translation amplitudes (up to ±250 m), leading to improved performance of the spectrometer. Furthermore we present a new method for accurate position detection of the MEMS device, thus enabling the implementation of closed-loop control. A dedicated circuit demodulates the reference signal and generates a highly accurate control signal returning the zero-crossing position of the mirror. The implementation of a closed-loop control ensures optimally stable MEMS mirror movement and maximal mechanical amplitude, even under varying environmental conditions allowing building robust MEMS-based Fourier-transform infrared (FT-IR) spectrometers with large mechanical amplitudes and thus good spectral resolutions.en621conference paper