Rank, R.R.RankFahland, M.M.FahlandKirchhoff, V.V.KirchhoffCharton, C.C.ChartonStöhr, U.U.Stöhr2022-03-092022-03-092001https://publica.fraunhofer.de/handle/publica/338427en667670620Deposition of multilayer optical coatings onto plastic webs by pulse magnetron sputteringconference paper