Schulz, UlrikeUlrikeSchulzRickelt, FriedrichFriedrichRickeltTrinkwalder, MichaelMichaelTrinkwalderPrinz, StephanStephanPrinzGratzke, NancyNancyGratzkeGärtner, AnneAnneGärtnerBingel, AstridAstridBingel2023-01-122023-01-122022https://publica.fraunhofer.de/handle/publica/43091810.1117/12.2633377Transparent polymers play a major role as materials for precision optics and optoelectronics. Transmissive optical surfaces need antireflection properties to avoid reflection losses and ghost images. As an alternative to common AR interference coatings, AR-nanostructures can be etched directly into the polymer surfaces and another structure can be added on top. The double-nanostructured surfaces provide low reflectance in a broad wavelength range for normal and oblique light incidence. Excellent AR-properties combined with a high thermal stability are demonstrated on imprinted epoxy-based micro-lenses.enanti-reflection (AR)anti-reflective nanostructuremicrolens arraysoptical coatingplasma etchingconference paper