Under CopyrightRommel, MathiasMathiasRommelRumler, MaximilianMaximilianRumlerFörthner, MichaelMichaelFörthnerScharin, MarinaMarinaScharinFader, R.R.FaderSchmidt, H.H.Schmidt2022-03-1328.4.20162016https://publica.fraunhofer.de/handle/publica/39170910.24406/publica-fhg-391709ennanoimprint lithographyS&R NILUV-SCILPDMSsoft imprint lithography670620530Stamps for nanoimprint lithography - R&D at Fraunhofer IISBpresentation