Weiler, DirkDirkWeilerHochschulz, FrankFrankHochschulzBusch, ClaudiaClaudiaBuschStein, MatthiasMatthiasSteinMichel, Marvin D.Marvin D.MichelWürfel, DanielDanielWürfelLerch, Renee G.Renee G.LerchPetermann, MartinMartinPetermannGeruschke, ThomasThomasGeruschkeBlaeser, SebastianSebastianBlaeserWeyers, SaschaSaschaWeyersVogt, HolgerHolgerVogt2022-03-132022-03-132018https://publica.fraunhofer.de/handle/publica/40070010.1117/12.2304866This paper presents the results of a high-performance digital QVGA-IRFPA based on uncooled microbolometers with a pixel-pitch of 17 mm and a chip-scale-package as the vacuum package developed and fabricated by Fraunhofer-IMS. Due to a direct conversion of the microbolometer's resistance into a 16 bit value by the use of massively parallel on-chip Sigma-Delta-ADCs a high scene temperature dynamic range of more than 300 K and a very low NETD-value below 50 mK is achieved. Due to a broad-band antireflection coating the digital 17 mm QVGA-IRFPA achieves a high sensitivity in the LWIR (wavelength 8 mm to 14 mm) and MWIR (wavelength 3 mm to 5 mm) range. In this paper the microbolometer, the vacuum-packaging, the architecture of the readout electronics, and the electro-optical performance characterization will be presented.enuncooled infrared detectorIRFPAQVGAmicrobolometeramorphous silicon17 µm pixel pitchSigma-Delta-ADC on chip621conference paper