Heidrich, H.H.HeidrichHamacher, M.M.HamacherAlbrecht, P.P.AlbrechtEngel, H.H.EngelHoffmann, D.D.HoffmannImhof, D.D.ImhofNolting, H.-P.H.-P.NoltingReier, F.F.ReierWeinert, C.M.C.M.Weinert2022-03-082022-03-081991https://publica.fraunhofer.de/handle/publica/318332The fabrication of an integrated GaInAsP/InP polarisation diversity circuit is described. The optoelectronic integrated circuit (OIC) is designed with respect to high process tolerances and easy process control. The actual data of test structures and the complex circuit are presented.engallium arsenidegallium compoundiii-v semiconductorindium compoundsintegrated optoelectronicsoptical receiveroptical workshop techniquessemiconductorreceiver fabricationoptical waveguidewaveguide networkcoherent optical receiver front-endpolarisation diversity circuitoptoelectronic integrated circuithigh process toleranceeasy process controltest structurecomplex circuitGaInAsP-InP621conference paper