Micro injection moulded MEMS with integrated piezoelectric PVDF

Heinrich, H.H.HeinrichSchulze, R.R.SchulzeWegener, M.M.WegenerKroll, L.L.KrollWalther, M.M.WaltherSchueller, M.M.SchuellerGeßner, ThomasThomasGeßner2022-03-122022-03-122012https://publica.fraunhofer.de/handle/publica/389957enMicro injection moulded MEMS with integrated piezoelectric PVDFconference paper