Quantification and reduction of deformations in multilayer soft-NIL stamps

Under CopyrightFörthner, MichaelMichaelFörthnerPapenheim, MarcMarcPapenheimRumler, MaximilianMaximilianRumlerStumpf, FlorianFlorianStumpfBaier, LeanderLeanderBaierRommel, MathiasMathiasRommelSchlachter, FlorianFlorianSchlachterHornung, MichaelMichaelHornungScheer, Hella-ChristinHella-ChristinScheerFrey, LotharLotharFrey2022-03-1326.10.20162016https://publica.fraunhofer.de/handle/publica/39340210.24406/publica-fhg-393402ennanoimprintcomposite stampstamp deformationsoft-NIL670620530Quantification and reduction of deformations in multilayer soft-NIL stampsposter