Mielsch, G.G.MielschSchalausky, R.R.SchalauskyGiersch, D.D.GierschScheibe, H.J.H.J.Scheibe2022-03-082022-03-082000https://publica.fraunhofer.de/handle/publica/304571Vacuum coating installation includes a coating chamber (1) which can be put under vacuum and accommodates a substrate (13) to be coated, and at least one source chamber (3, 3') which is connected to the coating chamber, and houses a source in the form of a cathode (4) for the source material. The coating chamber is vacuum-tight separable from the source chambers which can be put under vacuum. USE - For substrate coating. ADVANTAGE - Drawbacks (contamination of the coating material, low coating uniformity in the case of larger substrates, poor utilisation of the cathode material) of known installations are eliminated.de608667621671patent1996-19628102