Nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy: Manufacturing, characterization, and application

Under CopyrightJambreck, J.D.J.D.JambreckYanev, V.V.YanevSchmitt, H.H.SchmittRommel, MathiasMathiasRommelBauer, A.J.A.J.BauerFrey, L.L.Frey2022-03-1120.10.20102010https://publica.fraunhofer.de/handle/publica/36722810.24406/publica-fhg-367228enmetal tipnanoimprint lithographyscanning probe microscopyFIBTUNASCMNILSPMAFMatomic force microscopyscanning capacitance microscopyfocused ion beam670620530Nanoimprinted metallic probe demonstrators for electrical scanning probe microscopy: Manufacturing, characterization, and applicationposter