Samotaev, NikolayNikolaySamotaevOblov, KonstantinKonstantinOblovGorshkova, AnastasiyaAnastasiyaGorshkovaFritsch, MarcoMarcoFritschMosch, SindySindyMoschVinnichenko, MykolaMykolaVinnichenkoTrofimenko, NikolaiNikolaiTrofimenkoKusnezoff, MihailsMihailsKusnezoffFuchs, Franz-MarinFranz-MarinFuchsWissmeier, LenaLenaWissmeier2022-03-062022-03-062020https://publica.fraunhofer.de/handle/publica/26480410.1016/j.matpr.2019.12.394The progress of the Internet of Things stimulates the development of sensors of small size and low power consumption. Miniaturized metal-oxide semiconductor (MOX) gas sensors (e.g. methane, hydrogen or carbon monoxide detection) can be integrated into agro-industrial facilities such as livestock facilities, fish farming, forestry, food-storage and horticulture, where they support future-oriented plant production (smart agriculture). The central part of a MOX gas sensor is a micro-hotplate, which is mainly responsible for the sensor power consumption at operating temperatures from 450 °C to 600 °C. Under harsh environmental conductions, ceramic materials are the best choice for the micro-hotplate substrate and sensor housing (ceramic MEMS) in combination with platinum metallization for the heater. To realize such gas sensors with low power consumption (<200 mW) were developed of miniaturized printable heaters on ultra-thin ceramic membranes.enMEMSmetal oxide gas sensorinkjet printing technologyLaser Technology and Physicsceramics620666Ceramic microhotplates for low power metal oxide gas sensorsjournal article