Vedder, C.C.VedderStollenwerk, J.J.StollenwerkPirch, N.N.PirchWissenbach, K.K.Wissenbach2022-03-102022-03-102008https://publica.fraunhofer.de/handle/publica/3590052-s2.0-75149180447en621Production technology for transparent and conducting nano layersconference paper