Michel, B.B.MichelVogel, D.D.VogelSchubert, A.A.SchubertAuersperg, J.J.AuerspergReichl, H.H.Reichl2022-03-092022-03-091997https://publica.fraunhofer.de/handle/publica/328638en621The microDAC method. A powerful means for microdeformation analysis in electronic packagingconference paper