Echlin, M.P.M.P.EchlinTitus, M.M.TitusLenthe, W.C.W.C.LentheStraw, M.M.StrawGumbsch, P.P.GumbschPollock, T.M.T.M.Pollock2022-03-052022-03-052016https://publica.fraunhofer.de/handle/publica/24823910.1017/S1431927616001598en620Femtosecond Laser Damage in Metals and Semiconductors During TriBeam Tomographyjournal article