STEM-EDS line scans. A method for analyzing concentration depth profiles in PZT thin films

Wahl, S.S.WahlBerger, A.A.BergerMerklein, S.S.MerkleinSporn, D.D.Sporn2022-03-092022-03-091997https://publica.fraunhofer.de/handle/publica/329091en666STEM-EDS line scans. A method for analyzing concentration depth profiles in PZT thin filmsconference paper