Electrostatic force coupling of MEMS oscillators for spectral vibration measurements

Forke, RomanRomanForkeScheibner, D.D.ScheibnerMehner, J.J.MehnerGeßner, ThomasThomasGeßnerDoetzel, W.W.Doetzel2022-03-102022-03-102006https://publica.fraunhofer.de/handle/publica/354183enElectrostatic force coupling of MEMS oscillators for spectral vibration measurementsconference paper