Multi-purpose high-resolution nanoscale table-top ptychography at 13.5 nm

Liu, C.C.LiuEschen, W.W.EschenLoetgering, L.L.LoetgeringSchuster, V.V.SchusterKlas, R.R.KlasKirsche, A.A.KirscheBerthold, L.L.BertholdIliou, A.A.IliouSteinert, M.M.SteinertPertsch, ThomasThomasPertschHillmann, F.F.HillmannKrause, M.M.Krause2023-02-022023-02-022022https://publica.fraunhofer.de/handle/publica/43472210.1364/COSI.2022.CF1D.52-s2.0-85139114449We present our latest results on table-top ptychographic imaging at 13.5 nm. An overview and the identification of interesting areas are achieved with infrared illumination. XUV illumination provides sub-20-nm-resolution amplitude- and phase images.en13.5 nmInfrared illuminationMulti-purposeNano scaleMulti-purpose high-resolution nanoscale table-top ptychography at 13.5 nmconference paper