Drabe, ChristianChristianDrabeGraßhoff, ThomasThomasGraßhoffTodt, UlrichUlrichTodtFlemming, AndréAndréFlemmingSandner, ThiloThiloSandnerGrahmann, JanJanGrahmann2022-03-132022-03-132016https://publica.fraunhofer.de/handle/publica/393691en621Scanning optical MEMS with very high frequenciespresentation