Kunzel, H.H.KunzelAlbrecht, P.P.AlbrechtEbert, S.S.EbertGibis, R.R.GibisHarde, P.P.HardeKaiser, R.R.KaiserKizuki, H.H.KizukiMalchow, S.S.Malchow2022-03-092022-03-091997https://publica.fraunhofer.de/handle/publica/329536Iron doping using elemental source material evaporated from a conventional effusion cell was applied during MOMBE growth of semi-insulating InP and GaInAsP( lambda =1.05 mu m) for waveguide applications. The influence of the growth temperature and the doping concentration on the electrical and optical properties was investigated in the range from 455 degrees C to 505 degrees C and 5.1015 cm-3 to 5.1015 cm-3, respectively. High optical quality is demonstrated by the appearance of excitonic emission in iron doped layers at 10 K. Resistivities in excess of 109 Omega cm were obtained for both materials at medium doping levels grown at the lower end of the investigated growth temperature range. In addition, SIMS measurements revealed homogeneous incorporation behaviour of the iron dopant in these materials. A tendency towards some accumulation/segregation of the iron dopant was observed at higher doping levels and growth temperatures resulting in some decrease of the resistivity. GaInAsP/InP waveguide structures grown at 485 degrees C (which is the minimum temperature necessary for selective deposition) showed resistivities of 5.107 Omega .cm7 in combination with low optical losses of 2.5+or-0.5 dB/cm.enchemical beam epitaxial growthdoping profileselectrical resistivitygallium arsenideiii-v semiconductorsindium compoundsintegrated opticsironoptical fabricationoptical lossesoptical waveguidesphotoluminescencesecondary ion mass spectrasemiconductor dopingsemiconductor growthintegrated photonic devicesmombe growthsemi-insulating GaInAsPeffusion cellgrowth temperaturedoping concentrationelectrical propertiesoptical propertieshigh optical qualityexcitonic emissionresistivitiessims measurementshomogeneous incorporation behaviourfe dopingGaInAsP/InP waveguide structuresselective depositionlow optical losses1.05 mum455 to 505 c10 k1e9 ohmcm5e7 ohmcm621conference paper