Functionalization of sapphire surfaces using fs-laser radiation and selective etching

Hörstmann-Jungemann, M.M.Hörstmann-JungemannDobrzanski, D.D.DobrzanskiSchaefer, D.D.SchaeferKelbassa, I.I.Kelbassa2022-03-112022-03-112011https://publica.fraunhofer.de/handle/publica/373480en621Functionalization of sapphire surfaces using fs-laser radiation and selective etchingconference paper